Semilab China

RT-110 Resistivity Tester

RT-110

The Resistivity Tester is a non-contact bulk resistivity measurement tool for rapid classification of silicon wafers. It operates via eddy current technology.

The RT-110 resistivity tester is suitable for measurement of the resistivity and thickness of bare semiconductor wafers. The wafer handling is manual, the measurement starts automatically. The RT-110 can measure in 4 different resistivity ranges. Conductivity type determination is possible by the built-in P/N tester.

Features and System specifications:

• Resistivity range 0.01-20 Ωcm

• Computer controlled operation

• No sample preparation

• Measurement time about 1s (excluding handling)

• Manual wafer loading

Options:

• Wafer Thickness Measurement in the range of 200 to 1000 µm

• Probe for P/N conductivity type testing