Semilab China

FAaST 350 DSPV system

FAaST 350 DSPV

The FAaST 350 DSPV system is the flagship platform designed to provide world-leading, non-contact fast monitoring of heavy metal contamination, including sub 108 atoms/cm-3 Fe detection, with automated wafer handling from dual FOUP loadport loading stations fully capable of supporting the most demanding high-volume manufacturing environment.

Features and System specifications:

• Automatic robotic wafer handling

• Dual FOUP loadport; optional configuration with single loadport or including Versaport

• Automatic full wafer FAST mapping of diffusion length, Iron, and Other Recombination Centers (Nr)

• Option for advanced digital SPV functions, including Backsurface Recombination (Sb), Steady State Diffusion Length (L0), and Copper measurements

• FAaST software package, including measurement, recipe writing and data viewing applications

• Default configuration for 300 mm wafers with option for 200 mm / 300 mm bridge configuration

• Line conditioner with flexible compatibility

• Compatible for configuration with other Semilab SDI FAaST tool measurement technologies

• Additional available options include: Minienvironment, wafer edge-grip handling, wafer flipper for automatic backsurface measurement, 300 mm Semi-compliant automation, Seismic brackets, wafer OCR, RFID, cassette barcode reader