Semilab China

EIR-2500

EIR-2500

The EIR-2500 is a unique automated epi thickness measurement tool with infared spectroscopic reflectometer for high throughput epi thickness measurement. Fully compliant to the relevant SEMI / CE standards. The EIR product line is based on smart, reliable electronics, which improves tool uptime and decreases maintenance needs.

Features and System specifications:

• Wafer size: up to 300 mm

• Loadport: Single or dual casette loadport

• Fast mapping stage

• Capable of handling the IR reflectance measurement head (for epi thickness)

• Capable of handling additional measurement heads (for example Spectroscopic Ellipsometer, 4PP)

Measurement modes:

Interferogram mode:

• Measures interferograms, which are analyzed using direct inversion method.

• For fast measurements of thick epi layers and simple film stacks.

Reflectance mode:

• Measures reflectance. Interference fringes are observed in the reflectance spectra, which are analyzed using optical modeling of the filmstack.

• For thin (

Software Highlights:

• Semilab Automation Manager (SAM) to fully control the measurement cycle
• Recipe-based operation, based on SEMI recommendations
• Compliant with SECS/GEM, SECSII/GEM and CIM host communication standards (CMS, E87, STS and so on)

Smart evaluation of measurement interferograms:

• Interferogram substraction as standard analysis method
• Complex optical model for better precision in case of thin layers by reflection spectrum modeling
• Cepstrum method