Semilab China

Microspot spectroscopic ellipsometer-2500

µSE-2500

Microspot spectroscopic ellipsometer for patterned wafer applications.

Features and System specifications:

• DUV to Visible Ellipsometer in standard configuration

• Ellipsometer hardware: SE-RCE (rotating compensator) - high precision and accuracy

• Wavelength Range: 193 - 900 nm

• Measurable Box Size: 50 μm

• Fully automated characterization

• User friendly software SAM, compatible with SEMI® standard (E95-0200)

• Special designed optics for small spot

• CognexPatmax® Pattern recognition

• High accuracy automatic XYZ mapping stage

• Fast Omron Automatic focus

• Optical pre-aligner

Applications:

Primary applications:

• Front-end applications

• Production wafer monitoring

• Process development

Advanced Process Control:

• Across wafer uniformity

• Wafer to wafer uniformity

• Batch to batch uniformity

Options:

Metrology options (additionally to the standard spectroscopic ellipsometry):

• Spectroscopic reflectometry (SR)

• Photoluminescence (PL)

• Raman spectroscopy

Loading:

• 150/200 mm or 200/300 mm compatibility

• FOUP, SMIF and/or open cassette configuration