80 Las Colinas Lane San Jose, CA 95119 USA
DUV-Vis-IR (Wavelength Range: 190nm – 15,000nm) Scatterometers/Thin Film Metrology Systems:
The n&k Olympian Series is a DUV-Vis-IR scatterometer/thin film metrology system with micro-spot technology, covering the wavelength range from 190nm – 15,000nm. With the inclusion of the infra-red wavelength range, the Olympian Series extends the capabilities of n&k’s DUV-Vis-NIR scatterometer series – the OptiPrime-CD Series. The systems in the Olympian-Series are capable of determining thickness, n and k spectra from 190nm – 15,000nm of thin and thick films, as well as depths, CDs, and profiles of trenches and contact holes
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
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