N&K Technology, Inc.

LittleFoot Series

The n&kLittleFoot series are automated metrology systems used to fully characterize and monitor Thin Film and OCD applications for both current and next generation IC processes. With a ~40% smaller Footprint compared to similar metrology tools, the n&kLittleFoot allows for significant savings of wafer fab space without any compromise in effectiveness.

Utilizing patented all-reflective optics, a broadband wavelength range (190 – 1000nm), proprietary optical formulation, and an industry leading signal-to-noise ratio, each system provides the accurate and reproducible data required to monitor subtle changes in critical device parameters (thin film thickness, optical properties, critical dimensions (CD), poly recess profile, sidewall angle) across various key applications.