N&K Technology, Inc.

OptiPrime-CD Series

DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Scatterometers/Thin Film Metrology Systems: n&k OptiPrime-CD

The n&k OptiPrime-CD series are DUV-Vis-NIR scatterometers/thin film metrology systems, based on polarized reflectance measurements (Rs and Rp) from 190nm – 1000nm, with micro-spot technology. The systems in the OptiPrime-CD Series determine thickness, n and k spectra from 190nm – 1000nm of thin films, as well as depths, CDs, and profiles of trenches and contact holes.

Due to their ability to measure a large range of OCD and thin film structures that cover current and future applications, the tools belonging to the OptiPrime-CD Series are used extensively for power device and MEMS applications, as well as for the most challenging applications of today’s semiconductor industry.

The OptiPrime-CD Series is our “next-generation” DUV-Vis-NIR Scatterometer/Thin Film series. This series was launched in 2012, superseding the previous generation, 5000-CD and 1700-CD Series. Advancements in the optical design of the OptiPrime-CD Series provide a smaller micro-spot over the previous generation.