TF Series
DUV-Vis-NIR (Wavelength Range: 190nm – 1000nm) Thin Film Metrology Systems for Patterned and Unpatterned Wafers:
The n&k OptiPrime-TF, OptiPrime-TF-M and n&k LittleFoot-TF are DUV-Vis-NIR thin film only metrology systems, based on unpolarized Reflectance (R) measurements from 190nm to 1000nm with microspot technology. These tools measure thickness and n and k spectra from 190nm – 1000nm of thin films on patterned and unpatterned wafers.
Analogous to their scatterometer counterparts, the OptiPrime-TF, OptiPrime-TF-M and LittleFoot-TF are our “next-generation” DUV-Vis-NIR thin film series, launched in 2012, superseding the previous generation, 7000, 3000, and 1700 Series, respectively. Advancements in the optical design of the OptiPrime-TF Series provide a smaller micro spot over the previous generation.
The n&k LittleFoot-TF is a fully automated system, with approximately 40% reduction in footprint, resulting in a significant savings in the utilization of fab space. This reduction in footprint is achieved through an innovative and patented wafer handling mechanism. The n&k Little-Foot-TF is as reliable and fast as any robot-based handing system, but at a much reduced cost.
