Pedestal Heaters
Pedestal Heaters
Precision-Engineered Pedestal Heaters
Cast Aluminum Solutions is a leader in designing and manufacturing high-performance pedestal heaters. Excellence is our goal at every step, from needs analysis and initial design, through iterative thermal and structural modeling, to prototyping fabrication and testing, and the transition to high-volume production.
- Our cast-in approach delivers long heater life and unmatched thermal uniformity. Vacuum brazed and interference fit construction (IFC) approaches are excellent non-cast alternatives.
- Aluminum 356 is the primary casting alloy for pedestal heaters, with exceptional compatibility for most process environments, and a maximum operating temperature of 450°C (840°F), with typical temperature uniformity of ±0.3% or better.
- With IFC, aluminum 6061 can be utilized, or for higher operating temperatures, CAS offers solutions in various stainless steel grades, copper, nickel, and other high-performance alloys.
- Precision CNC machining creates components that meet rigorous flatness requirements; surface features, such as wafer lift holes, proximity pins, and vacuum groove arrays are also available.
- Shafts are integrated via TIG or electron beam welding then helium leak checked for vacuum integrity.
- Coating options include hard-coat anodizing, electroless nickel plate, gold or copper plate, powder coating options, micro lapping, and more. Passivation procedures are also available.
- Cleaning and packaging to semi-industry specifications is available at our in-house cleanroom facility.
A cast-in heater offers several performance advantages over competing technologies. With the cast-in design, heating elements maintain intimate contact with the metal substrate, delivering uniform heat transfer and longer overall life, for a lower total cost of ownership.
For applications exceeding the parameters of our cast-in approach, CAS offers interference fit construction (IFC), which utilizes aluminum 6061. For applications above aluminum’s temperature limit, stainless steel, Inconel, copper, or other substrates may be selected. Joints may be electron-beam welded to provide compatibility with high-vacuum applications.
CAS excels at developing and manufacturing highly-evolved wafer heaters. Features such as cooling tubes and multiple heating zones may be incorporated, permitting shorter cycle times and improved temperature management. To facilitate seamless integration with control packages, pedestal heaters are equipped with thermocouple or RTD sensors.
Using Finite Element Analysis (FEA), including the industry-leading Ansys® software suite, CAS Engineers develop thermal and structural models to evaluate the performance of heaters and components before prototypes are produced. These advanced tools allow optimal performance can be achieved with fewer manufacturing iterations.
Testing, assembly and packaging procedures can be accomplished in our on-site cleanroom. Semiconductor components from Cast Aluminum Solutions are available with final ultrasonic cleaning or passivation procedures. Packaging options that meet specific Semi standards are also available.
Serialized engraving is an option for all semiconductor products from Cast Aluminum Solutions. CAS understands the need for traceability in this market, so customer-specified documentation procedures and copying exact controls are key tenets of our operating procedures.
