Cast Aluminum Solutions

Wafer Cleaning, Rinsing, and Drying Applications

Wafer Cleaning, Rinsing, and Drying Applications

Cast Aluminum Solutions offers several standard fluid heating products (compatible with both inline and recirculating tank installations), compatible with the full range of post-chamber wet bench and wafer drying applications. All these options are designed to safely heat flammable media without the risk of explosion or flashing.

• All CAS inline circulation heaters feature our ‘no contact’ design. Heated media is isolated in flow-tubes, never contacting the heating element - a critical safety and contamination-prevention feature.
• Universal Solvent Heater: Designed to heat low-flashpoint solvents (N-Methyl-Pyrrolidone, IPA, etc.). This heater features an explosion-proof NEMA 7 electrical enclosure, electropolished flow-tube ID, Teflon®-covered body, and multiple temperature sensors. Fitting options include VCR, NPT, or Flaretek-style connections.
• CAST-X Heaters: Our CAST-X line of circulation heaters is available in 6 base sizes, with power ranges from .5 to 60 kW. Standard flow-tubes are 316 seamless SST, with EP options available. CAST-X circulation heaters are well-suited for heating DI water and other solvent removal products.
• PUR-X Heaters: This heater features a removable & replaceable PFA (Teflan®) flow-tube. PFA Tube material is compatible with many caustic solvents. Tube replacement does not require a help ticket and can be customer-completed in under 30 minutes. PUR-X Heaters are appropriate for wafer cleaning, rinsing and drying applications

Our Universal Solvent Heater is specifically designed to heat low-flashpoint photoresist solvents. Liquids are isolated in the main flow-tube, never touching the heating element. Multiple sensors and a secondary cooling tube provide outstanding operating temperature control. The terminal enclosure is rated NEMA 7 explosion-proof, and the heater body is Teflon®-coated for corrosion resistance.

PUR-X 1000 and 2000 inline heaters feature field-replaceable high-purity PFA flow-tubes, compatible with many solvents. In some cases, the PFA tube is preferred over a stainless steel flow-tube. PUR-X Heaters are also appropriate for heating nitrogen, argon, and other gases used in wafer drying applications.