Cast Aluminum Solutions

Carrier and Process Gas Delivery Heaters

Carrier and Process Gas Delivery Heaters

Our PUR-Therm Gas Delivery Heater  - with a design unique to Cast Aluminum Solutions - has been meticulously engineered and thoroughly tested to meet the semiconductor industry’s most stringent purity standards for the heating of carrier gases and process gases destined for the deposition chamber.

• PUR-Therm was designed as a more efficient, more precise mechanism for heating carrier gases and chamber process gases (when compared to silicone wrap gas line heaters).
• Gases are isolated in a .25" (6.3mm) OD ultra-high purity seamless 316L seamless stainless steel flow tube, with pre-installed industry-standard ultra-high purity VCR fittings.
• Third-party particle testing (for >=0.3 μm and >=0.1 μm size particles) shows PUR-Therm’s flow-tube meets the Semi F70 standard for Ultra-High Purity.
• The flow-tube’s electropolished ID meets Semi F19 standards for Ultra High Purity: Avg. Ra = 2.53 μin (0.064262 μm), Maximum Ra = 3.19 μin (0.081026 μm).
• The flow tube's bend radius complies with Semi E49 Guidelines for Inert and Reactive Gases.
• Passivation to ASTM-967 specificiations is standard.
• Features a replaceable heating element: 400 Watts / 208 Volt is standard, with other options available.
• A dual-sensor K-type thermocouple is standard (J-Type available upon request).
• The optional insulating jacket meets Semi S2 touch-safe standards.

PUR-Therm Gas Delivery Heaters are designed to heat carrier and process gases much more efficiently than silicone gas line heaters while maintaining Ultra High Purity specifications. PUR-Therm Heaters are easily incorporated into gas cabinets using industry-standard process controls (PID, PLC, etc.) and UHP VCR fittings.

Third-party particulate matter testing using the Semi F70 protocol shows PUR-Therm’s flow-tube meets the Ultra High Purity specification for contaminants. This can be attributed to a low-Ra electropolished tube ID, multiple manufacturing controls, and a robust product test regime (including scanning electron microscopy, x-ray photoelectron spectroscopy, and AES analysis).