Custom-Engineered Semiconductor Components
Custom-Engineered Semiconductor Components
Leading equipment manufacturers rely on CAS for specialized components that solve difficult process challenges. Our dedicated New Product Development Team, supported by a large in-house R&D Lab, shepherds custom-engineered components through the full development cycle, from concept to prototype and production.
- CAS’s New Product Development Team offers engineering tools and manufacturing resources explicitly dedicated to modeling, fabricating, and testing new products and custom-engineered prototypes.
- Engineering and laboratory technologies include structural and thermal modeling using finite element analysis (FEA), x-ray and ultrasound inspection technology, helium leak testing, 3-D CAD software, accelerated life cycle testing, and infrared thermal imaging in both ambient and vacuum chamber setting.
- Examples: heated shower heads for gas distribution, heated chamber liners & lids, rim & edge heaters, cleanroom air heaters, valve cylinder heaters, special inline liquid/gas heaters, special-geometry heated platens, and custom chill plates for wafer cooling stations.
- Available materials include aluminum 356, aluminum 6061, stainless steel, bronze, copper, and more.
- Fabrication techniques include cast-in, IFC (interference fit construction, and vacuum brazed.
This chamber cover was designed by our New Product Development team. The primary plate has an interference-fit cable heater which was precision-formed for uniform heat distribution. Two temperature sensors are also integrated. This component’s power and control fitments were engineered for easy unification with the customer’s existing control panel.
This highly-customized wafer heater has several unique features. The platen material is bronze, chosen for its compatibility with operating temperatures above 450°C. In addition to a multi-zone heating system, the unit has an integrated cooling tube, plus RTD temperature sensors.
This heated gas distribution showerhead nicely illustrates the precision that can be achieved with our in-chamber devices. A 500-watt tubular heater is fit around the circumference, with hundreds of tiny distribution holes evenly patterned machined across the face. CAS also fabricated precision-mated backing plates for these units.
Our full-service test lab can validate temperature uniformity using surface mounted sensors (seen here) or via infrared cameras (in either atmospheric or vacuum chamber test environments). Accelerated life-cycle and reliability tests are conducted using variable voltage power inputs, elevated operating temps, and irregular ramp rates. Advanced data logging equipment provides the required documentation.
