SmarAct GmbH.

SmarAct GmbH.

Schuette-Lanz-Strasse 9 26135 Oldenburg Germany

SLC-1720 - Linear Piezo Stage

SLC-1720 - Linear Piezo Stage

SLC-1720 - Linear Piezo Stage

The SLC-1720 is the smallest nanometer precision linear stage in SmarAct's SLC-17 series. At 22 x 17 x 8.5 mm, it is the world's smallest closed-loop piezo stage with nanometer resolution and macroscopic travel range.

Please note that the downloadable documents for this linear piezo stage show the dimensions and specifications of a 1720 for atmospheric or HV environments, equipped with an S-position sensor.

Specifications

Download Spec Sheet

Mechanical

Scan Range [µm]

> 1.3

Travel [mm]

12

Blocking Force [N]

≥ 3.5

Max. Normal Force [N]

10

Max. Lift Force [N]

> 1.5

Dimensions [mm]

22 x 17 x 8.5

Weight [g]

13

 

Open-loop

Velocity [mm/s]

> 20

Open-Loop Resolution MCS2 [nm]

 

 

Closed-Loop

Velocity [mm/s]

> 20

Sensor Resolution MCS2 [nm]

1 (S), 4 (L)

Sensor Resolution (H)CU [nm]

100 (L)

Uni-Directional Repeatability MCS2 [nm]

± 40 (S,L)

Uni-Directional Repeatability (H)CU [nm]

± 200 (L)

 

Options

Material Options

Aluminum base as standard; Steel base (-ST); Titanium base (-TI); Black anodized (-BK)

Mechanical Options

U-shaped base for higher mechanical strength (-W): width is 6mm larger; cage-creep-free guideways (-Z)

Performance Options

Higher blocking force (-D): +1.5 N

Cryogenic Option

Yes (only open-loop)

Vacuum Options

HV (1E-6 mbar); UHV (1E-11 mbar)

Non-Magnetic Option

Yes, changes of the slide hole pattern apply: all threaded holes

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