PVA TePla America, Inc

Photoresist Ashing IoN 100-40Q Plasma System

The Photoresist AshingIoN 100-40Q Plasma System is a barrel plasma reactor designed for high volume production applications. The technology is based on the proven reactor designs developed over the course of 50+ years by International Plasma Corporation, Branson ICP, Dionex, Gasonics, Metroline, TePla and finally PVA TePla. IoN 100-40Q uses a larger chassis that provides all the gas and power connections.

FEATURES INCLUDE:

• Plug and play self installation
• Industrial computer with LCD touch panel and keyboard. Windows based operating system.
• Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
• Multi-level of user access
• Software
• Recipe editor for fast and versatile step controls
• Onboard diagnostic features and alarm logging
• Remote process monitoring via Ethernet
• Online web based simulation/training/support
• Vacuum pump power outlet on the chassis
• Energy saving feature for vacuum pump

TYPICAL APPLICATIONS:

• Photoresist ashing and descum
• Surface cleaning
• Surface activation