PVA TePla America, Inc

IoN 10Q Plasma System

IoN 10Q RF Plasma System

The IoN 10Q Plasma System is a barrel plasma reactor designed for R&D and production applications. The technology is based on the proven reactor designs developed over the course of 50+ years by International Plasma Corporation, Branson IPC, Dionex, Gasonics, Metroline, TePla and finally PVA TePla. PVA TePla is a proven and trusted resource globally for high-quality, reliable, cost-effective and easy to operate Gas Plasma Systems. It offers some of the most advanced and innovative solutions for a wide variety of applications.

Features Include:

• Small foot print table top design
• Plug and play self installation
• Industrial computer with LCD touch panel and keyboard. Windows based operating system
• Graphical User Interface (GUI) software complies with CFR Title 21 Part 11 and Semi E95-1101
• Multi-level user access
• Software
• Recipe editor for fast and versatile step controls
• Onboard diagnostic features and alarm logging
• Remote process monitoring via Ethernet
• Online web based simulation/training/support

Typical applications

• Photoresist ashing and Descum
• Surface cleaning
• Surface activation