Substrate Stocker Systems
Genmark’s expansive Substrate Stocker series supporting front-end and back-end IC manufacturing processes incorporates its most advanced robotics, motion control and software technologies to achieve high levels of automation in the storage, retrieval and tracking of many types of wafer carriers, box reticles and molds used in semiconductor fabrication environments.
Among one of the stocker’s unique design features are high performance robots with extended vertical travel via vertical track enabling fast storage and scalable capacity.
Genmark’s highly sophisticated ECS300 Equipment Control Software is offered as a standard feature.
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
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