EVTMHS Extended Vertical Travel Robot System
The EVTMHS is a wafer handling system with extended vertical travel designed to transport 300mm and 450mm wafers in semiconductor manufacturing tools that require large work envelope solutions.
The system can also handle 200 mm wafers without any hardware changes. While for wafer sizes below 200 mm, the robot End-Effector has to be reconfigured. The time that this reconfiguration takes is usually less than an hour including the time needed to teach all the pickup positions. Thus, the average teaching time of 45 minutes (for pickup locations) can be achieved thanks to the sophisticated autoteach routines provided by the system firmware.
The optional through beam mapping sensor allows for reliable detection of normally inserted, cross-slotted, or double-slotted wafers in FOUPs and boats. Depending on the chosen arm configuration the system can access one or two in-line Semi standard FOUPs. From the operational point of view, the system is fully integrated and controlled by a single controller.
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