SortMax300 HT™
Genmark’s SortMax300 HT™ is capable of achieving the highest wafer per hour throughput requirements while operating under strict reliability and cleanliness specifications. Based on modular design it can support configurations up to 8 FOUP/FOSB stations. Highest throughput capacity is a result of expanded technological features including uniquely designed dual end-effector wafer transfer mechanisms based on Genmark’s proven GREX dual arm robot series.
SortMax300 HT™ also offers highly improved software functionality and reliability based on the latest ECS300 Equipment Control Software suite. Along with rapid set-up, the highly sophisticated software suit has been improved to included built-in support for the latest fab requirements. Special “auto-teach” scripts are included to further simplify the wafer-handler teaching process, optimize operator interface and reduce downtime during maintenance periods.
Genmark's high throughput wafer sorter SortMax300 HT™ is designed for handling up to 300mm wafers and is offered in standard or custom configurations. A wide array of end-effectors, wafer mappers and single or dual wafer aligners are some of its many options.
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
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