GB4S-W Robot System
Genmark’s “wet” process wafer handling robot, the GB4S-W Robot System, offers precision, performance, and reliability. The GB4S-W assures optimal performance and maximum up time of wet process equipment with minimal footprint. The GB4S-W addresses all major concerns such as premature damage of robot’s mechanisms due to moisture/humidity operational conditions associated with wet process applications including CMP and other applications.
The GB4S-W robot features exceptional load carrying capacity, unmatched reliability and low cost of ownership to achieve the highest level of performance available in “wet” environment wafer transport applications. The GB4S-W robot system is available in single and dual wafer configurations and in various reach and vertical stroke combinations.
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
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