Advanced 300mm Metrology System
The Atlas XP+ metrology system accommodates both 200 or 300 mm wafer metrology. The system incorporates a dual-arm robot, high-precision stage and high-speed focus system. The system also features advanced pattern recognition, improved thickness reproducibility and superior SR and SE throughput. The N2000 software interface and advanced automation are compliant with standards adopted by SEMI and other organizations. The NanoNet feature, a network component of Nanometrics’ N2000 Analysis Platform software provides system-to-system matching and seamless recipe transferability.
The Nanometrics Atlas system can be configured with any combination of the following metrology modules:
- Spectroscopic reflectometer (SR)
- Spectroscopic ellipsometer (SE)