Axcelis Technologies

GSD Ovation high current and high energy batch ion implanters

The GSD platform is the industry benchmark for the longest manufactured and supported batch ion implanter. The Ovation™ is the latest batch configuration designed to seamlessly integrate with the existing fleet of Axcelis batch implanters, while providing incremental performance improvements with updated components for long-term sustainability. The Ovation extends the GSD series platform’s production relevance into the future while delivering the highest reliability, serviceability and lowest cost of operations.