Axcelis Technologies

Purion XE Series high energy ion implanters

Optimize Your Energy Level

The Purion High Energy Series includes a variety of implanters, allowing you to select the optimal energy level for your application:

• Purion XE—12-stage LINAC with energies up to 4.5 MeV
• Purion EXE—12-stage LINAC with higher energy than Purion XE up to 5.25 MeV
• Purion VXE—14-stage LINAC with energy booster, delivering energies up to 8 MeV
• Purion XEmax—Dual LINAC design with patented Boost TechnologyTM for the highest energies up to 15 MeV
• Purion XE Power Series—XE and EXE models designed for high volume power devices aluminum implantation, 150mm SiC wafer handling or 200mm thin Si wafer handling