Aerotech Germany

Agv-Spo Galvanometer

Design Features

• Larger field of view than traditional 2D scanners simplifies the processing of larger parts

• Minimal spot distortion over the entire field of view minimizes processing variation for the highest quality laser-processed parts

• Air and water cooling options provide thermal stability and improve long-term accuracy

• Many choices of mirror surface treatments for a variety of laser wavelengths

Aerotech’s AGV-SPO single pivot-point galvanometer scanner provides an alternative to traditional two-mirror galvo scanners. Derived from the popular AGV-HPO scanner, the AGV-SPO enables a larger field of view and reduced spot distortion for critical laser micromachining applications.

Large Field of View with Minimal Spot Distortion

A unique optical design effectively controls the beam entrance pupil to be coincident for the X and Y scanner motion, increasing the effective numerical aperture of the scanner system. This design directly enables a larger field of view for a given focal length and reduces spot distortion over the entire working area. These advantages mean that the AGV-SPO is able to process larger parts faster and with greater consistency.

Design Configurations

The AGV-SPO is available with a selection of optical coatings and focusing optics to support a variety of commonly-used laser wavelengths and focal lengths. To support other needs, Aerotech can supply the AGV-SPO with customized optics and optical mounting features upon request. The AGV-SPO can be configured with air-cooled mirrors, water-cooled motors, or both. These active cooling features help to preserve working-plane accuracy in the presence of thermal disturbances caused by the laser as well as aggressive motion profiles.

Advanced Programming Features

The AGV-SPO utilizes all of Aerotech’s advanced motion and Position Synchronized Output (PSO) capabilities that have been developed for laser processing applications with traditional galvos and servo stages. Contouring functions such as Acceleration Limiting can be used to automatically reduce speeds in tight corners or small radii to minimize overshoot. The laser can be triggered based on the position feedback of the mirrors with PSO to ensure consistent spot overlap as the scanner changes speed.