Toho Technology Inc.

4 Point Probe

4 Point Probe

Industry Standard Sheet Resistivity

Four point probe systems for sheet resistivity measurements on a large variety of materials including group-IV semiconductors, metals, and compound semiconductors, as well as new materials found in flat panel displays and hard disks. The Four Dimensions Four-Point Probe uses two current-supplying and two voltage-sensing probes to provide highly accurate and reproducible sheet resistivity and thickness measurements on a wide variety of materials. The system features user-friendly “one-touch” operation and auto-calibration. Capable of measuring 50 sites in 90 seconds, measurements range from 1mΩ/sq to 800kΩ/sq and extend up to 8E11Ω/sq.

Applications

P/N type testing

• Silicon substrates
• Epi Layers
• SOI
• Ion Implant dose & Uniformity
• Poly resistivity & thickness
• Metal deposition monitor
• Silicide process monitor
• Ion Implant diffusion
• Poly gate process monitor
• ITO
• Metals
• Poly-Si, a-Si