Argon Plasma Systems
Argon Plasma Systems
Surfx’s argon plasma systems provide reliable and reproducible gas plasma treatment ranging from R&D to high-volume production. These machines are specifically designed for in-line, point-of-use treatment within a manufacturing line.
100% Electrically Neutral Will not damage sensitive polymers and electronics.
Plasma Sources
The A600 contains a 600 W RF power supply and operates the minibeam, and 25, 50, 75 and 100 mm plasma heads.
Highly Efficient
The highly efficient capacitive discharge rapidly cleans and activates surfaces, while keeping gas consumption to a minimum.
Real-time Monitoring
RF power, gas flow rates and head temperature monitored and controlled in real time.
Surfx Plasma Systems
Surfx’s argon plasmas are well suited for surface cleaning, activation and adhesion improvement. We provide a complete array of handheld and automated products for precision surface preparation. Our argon plasma heads generate a uniform beam of reactive gas at low temperature, that are electrically neutral. Thermally sensitive polymers and electronic components will not be damaged when exposed to the plasma beam. The plasma does not generate stray voltages, sparks, streamers, ultraviolet light (UV), or electrostatic discharges (ESD). Treatment of material surfaces occurs at high throughput so that millions of parts can be processed each year in one machine. Our plasma systems are rugged and reliable and will provide years of trouble-free operation.
The AtomfloTM 500 and 600 Plasma Systems
Our argon plasma systems are supplied with a controller, coolant control module, plasma head, and cable set attaching the head to the controller. The A500 contains a 300 W RF power supply and operates the minibeam, and 25 and 50 mm linear plasma heads. The A600 contains a 600 W RF power supply and operates the minibeam, and 25, 50, 75 and 100 mm plasma heads. The machine is fed with argon, and up to two additional process gases, which may be oxygen, nitrogen, hydrogen, or another gas depending on the chemistry desired. Oxygen and nitrogen plasmas are well suited for cleaning polymer and metal surfaces for bonding. The hydrogen plasma is well suited for removing oxides from metals, such as gold, silver, copper and solders.
Main features of the plasma controller
- Eight inch touchscreen display
- Radio frequency power supply at 27.12 MHz with auto-tuning matching network
- Water-cooled plasma heads controlled by closed-loop recirculation system
- Precision gas manifold with mass flow controllers that supply argon and two process gases at 0.5 to 2.0 volume %
- Real-time monitoring and control of the forward and reflected power, the argon flow rate, the two process gas flow rates, and the head temperature
- Input/output options include Ethernet or RS232
