Surfx Technologies

100-mm Linear Plasma Head

100-mm Linear Plasma Head

The SPS-100 is a linear beam plasma source designed to clean and activate substrates for improved adhesion. It is ideal for semiconductor packaging and electronics manufacturing.

Surfx’s Atomflo™ 600 controller operates the SPS-100 linear plasma source by supplying it with radio frequency (RF) power, argon gas flow at 32 LPM and 1.0% oxygen, nitrogen, or hydrogen. Liquid temperature control through the head to keep it at a constant temperature. Once the system is turned on, a uniform, particle-free, and electrically neutral plasma beam fills the 100-mm-wide slit and bathes the substrate in a flow of active oxygen, nitrogen, or hydrogen atoms.