Mactronix

Automatic Wafer Transfer MCL-x50

Features and Benefits

• The MacLite Senior Series with junior function, transfers wafers between two 25-slot carriers and one 50-slot process boat. Carriers/boats can be plastic, Teflon®, Quartz, Silicon Carbide, Polysilicon or metal.
• Fast & Smooth, featuring ramped speeds and soft landing. A 50 wafer transfer is under one minute.
• Operator interface is with a 12 key keypad with a 4 line LCD display. START/STOP butttons optional
• MacLite machines are totally electronic, with an auto switching power supply, 110 VAC 60 Hz or 240 VAC 50/60 Hz.
• The machine will not introduce more than 1.5 particles, greater than .23 micron in diameter, per wafer per transfer (machine must be exhausted to achieve this figure).
• Single Board PC controlled.
• Sensors detect wafers and cassette or process carrierpresence for safety.
• Flat alignment is maintained during transfer.
• Machine will not drop wafers in the event of a power failure and will prompt the operator through the Recovery Mode after power has been restored.
• All exposed aluminum parts are hard Black Anodized.