CoorsTek provides wafer boats, pedestals, and custom wafer carriers for both vertical / column and horizontal configurations. Advanced ceramics deliver excellent thermal resistance and plasma durability while mitigating particles and contaminants. Semiconductor-grade silicon carbide (SiC) also provides high-temperature strength for high-capacity wafer carriers.
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
Please fill the all required fields....!!