LINERS & PROCESS TUBES
Process tubes are used in the reaction zones of semiconductor furnaces - requiring high purity and thermal stability. Some processing equipment uses liners within the process tubes. Smaller, traditional process tubes typically use quartz. Larger, higher performance tubes frequently use high-performance silicon carbide (SiC) with superior strength, rigidity, and durability.
Sincerely Plantautomation Technology
Regards,
Client Success Team (CRM),
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