ARM Automation, Inc.

Laser Micro-Machining Tool for Semiconductors Masks

ARM Automation was approached by a leading producer of semiconductor photomasks to develop a next generation of laser micromachining tool for use in their day-to-day production and repair of photomask products.  Photomasks, or “reticles”, are used as the templates for creating each unique layer of a semiconductor device.  These products are essentially ground panes of crystalline quartz which are coated on one side with a thin film of chromium metal into which intricate patterns are cut to form the various circuit paths.  Once patterned, these reticles are used as master “stencils” in the making of semiconductor devices, therefore, any errors present following the time-consuming writing process must be corrected.  Most common repairs involve trimming rough edges of feature geometry or filling in the gaps of mis-made opaque areas.  Given feature sizes on the order of 1 micron (1000th of a millimeter) or less, this work is accomplished by viewing the workpiece through microscope which also acts as the final beam delivery path for both laser systems.   The ART (ARM Repair Tool) system was designed to do enable mask makers to make these repairs in a cost effective and timely manner compared to alternative technologies available.