Vacuum Cluster System

The wafer transfer robot in vacuum is a customizable system which has high throughput, with AWC function.

It has fast swap time, reliable and easy for maintenance. It contains vacuum, gas line & I/O box, heater unit (with 5 +5 type) and cooling unit. It encompasses Stack load lock, Batch load lock.

Other Products

Delta Robot (DeltaFly™)

Atmospheric Vaccum Robot

EFEM (SmartFab™)

Atmospheric and Vaccum Robot