EFEM (SmartFab™)

Equipment Front End Module, in short referred to as EFEM has been specifically designed for 200mm and 300mmwafer transfer service. Easy leveling and docking for swift preparation is very much possible in this wafer handling robots and designed for customizable configuration as well.

It has a close loop control of enclosure pressure and field maintenance service is also available.

Other Products

Delta Robot (DeltaFly™)

Atmospheric Vaccum Robot

Vacuum Cluster System

Atmospheric and Vaccum Robot