Atmospheric and Vaccum Robot

Atmospheric and Vaccum robot for handling Flat panel, Cassette, Solar cell

These Medium Flat Panel Atmospheric Robots are like the atmospheric wafer handling robot in matters related to meeting the user’s requirements along with swift delivery by making of 6-axis only. This too has high stiffness along with minimum weight and utilizes optimum structure design.

The Flat Panel Atmospheric and Vacuum Products are highly reliable, with 6-axes and even has high throughput. The robots minimum weight is 75kg and 1250kg at maximum.

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