Sensirion AG

Mass Flow Meter SFM3020

Analog flow meter for high-volume application

The SFM3020 mass flow meter is the analog sibling of SFM3003 and particularly suitable for high-volume applications. The design of the flow channel results in a very low pressure drop, making it ideal for medical ventilation.

The flow of air and oxygen at rates from -10slm to 160slm is measured with excellent accuracy and extremely high speed. The signal is internally linearized and temperature compensated and provided as an analog output voltage for easy read out.
As part of the SFM3xxx platform, the SFM3020 is a versatile sensor solution for many different high-volume applications in which cost efficiency is the priority and analog the preferred interface. The outstanding performance of the SFM3020 sensor is based on Sensirion's patented CMOSens® Technology, which combines the sensor element, signal processing and digital calibration on a tiny microchip. The gas is measured by a thermal sensor element to provide an extended dynamic range and enhanced long-term stability compared to other flow measuring technologies. Thanks to this proven CMOSens® Technology, the flow meter is perfectly suited for high-quality mass production and is the ideal choice for demanding and cost-sensitive OEM applications.

For evaluation with our Control Center test software, please consider the digital sensor SEK-SFM3019, which can be connected with the SEK-SensorBridge to any computer.

Features

1. Very low pressure drop < 5mbar @ 200slm
2. Flow range: -10slm to +240slm (one-directional)
3. Accuracy 3% m.v.
4. Ultra-fast response time
5. Low dependency on different inlet conditions
6. Digitally calibrated & temperature compensated
7. Medical cones for pneumatic connection to standard breathing circuits
8. Mechanical interface for electrical reconnection
9. Digital Output (I²C)

Applications

1. Medical ventilation
2. Anesthesia
3. Respiratory applications