Industry Press Releases

MKS introduces New Automation Platform

Wednesday, Jun 24, 2015
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MKS Instruments, Inc., a global provider of technologies that enable advanced processes and improve productivity, has introduced the MKS Automation Platform, a modular, scalable and configurable solution for comprehensive control that improves operational and productivity efficiencies. It provides a low total cost of ownership and improves utilization of existing tools and assets. The Automation Platform seamlessly integrates with other MKS products, and its library of process routine templates and function blocks facilitates faster implementation.

The platform's hardware and software are both scalable and flexible due to its modular and open architecture, as well as its support for many fieldbuses and control networks. It consists of two programmable automation control options (MKS PAC 100 & PAC 1000); a variety of IO modules for interfacing to any type of sensor, actuator, valve, etc.; and the MKS Controls Workbench software for configuration, process monitoring, tuning, and data storage. MKS integration services assist in recipe and logic development, integration and training.

The platform leverages MKS Umetrics advanced analytical solutions to drive improved automation via real-time actionable data insights. It is highly suitable in a variety of applications, including open and fully programmable automation control, remote or distributed IO, multi-zone temperature control, and remote process control. Its compact, high density design reduces the number of modules and controllers required, saving cost and tool real estate.

Note to editors: To download a photo of the Automation Platform control solution, please go to the MKS web site: http://www.mksinst.com/photos.

About MKS:

MKS Instruments, Inc. is a global provider of instruments, subsystems and process control solutions that measure, control, power, monitor and analyze critical parameters of advanced manufacturing processes to improve process performance and productivity. Our products are derived from our core competencies in pressure measurement and control, materials delivery, gas composition analysis, control and information technology, power and reactive gas generation, and vacuum technology. Our primary served markets are manufacturers of capital equipment for semiconductor devices, and for other thin film applications including flat panel displays, solar cells, light emitting diodes, data storage media, and other advanced coatings. We also leverage our technology in other markets with advanced manufacturing applications including medical equipment, pharmaceutical manufacturing, energy generation, and environmental monitoring.

Corporate contact:

MaryAnn Naddy
Phone: 978-645-5538
Fax: 978-557-5100
MaryAnn_Naddy@mksinst.com

 

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